Course Code
MM 448
Course Name
Thin Films Lab
Title of the course
MM 448: Thin Films Lab
Credit structure
| L | T | P | C |
| 0 | 0 | 1.5 | 1.5 |
Pre-requisite, if any
None
Course content
Understanding of vacuum generation and characterization. Determination of pumping rate of rotary pump, leak rate of vacuum systems. Understanding of various pumps and vacuum gauges. Physical vapor deposition of metallic films: resistive evaporation, electron beam evaporation, DC sputtering. Determination of sheet resistance by 4-probe method.
Texts/References
L.I. Maissel and R. Glang, Handbook of Thin Film Technology, McGraw-Hill, 1970.
S. Dushman and J.M. Laferty, Scientific Foundations of Vacuum Techniques, John Wiley, New York, 1962.
S.A. Campbell, The Science and Engineering of Microelectronic fabrication, Oxford University Press, 1996.
Instructor(s) name
Prof. R.O.Dusane